Wentworth
Institute of Technology
Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1995]
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| Online Access: |
Full text (Wentworth users only) |
MARC
| LEADER | 00000cam a2200000ua 4500 | ||
|---|---|---|---|
| 001 | w728487 | ||
| 005 | 20240116152934.0 | ||
| 006 | m d | ||
| 007 | cr un- | ||
| 008 | 011105t19951995njua sbf 001 0 eng d | ||
| 019 | |a 49270283 | ||
| 020 | |a 1591241448 (electronic bk.) | ||
| 035 | |a (OCoLC)49708613 | ||
| 035 | |a (OCoLC)ocm49708613 | ||
| 040 | |a KNOVL |c KNOVL |d OCLCQ |d WEN |d UtOrBLW | ||
| 049 | |a WENN | ||
| 050 | 1 | 4 | |a TK7836 |b .W54 1995eb |
| 100 | 1 | |a Williams, Michael E. |0 n 2015052070 | |
| 245 | 1 | 0 | |a Semiconductor industrial hygiene handbook |h [electronic resource] : |b monitoring, ventilation, equipment, and ergonomics / |c by Michael E. Williams and David G. Baldwin ; contributing author, Paul C. Manz. |
| 264 | 1 | |a Park Ridge, N.J., U.S.A. : |b Noyes Publications, |c [1995] | |
| 264 | 4 | |c ©1995 | |
| 300 | |a xv, 348 pages : |b illustrations ; |c 25 cm | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry. | ||
| 533 | |a Electronic reproduction. |b Norwich, N.Y. : |c Knovel, |d 2001. |n System requirements: Adobe Acrobat Reader. |n Available via the World Wide Web. |n Access restricted to users at licensed institutions. | ||
| 650 | 0 | |a Semiconductor industry |x Employees |x Health and hygiene. |0 sh 85119894 | |
| 650 | 0 | |a Industrial hygiene. |0 sh 85065884 | |
| 700 | 1 | |a Baldwin, David G. |0 n 94079497 | |
| 700 | 1 | |a Manz, Paul C. |0 no2010054216 | |
| 710 | 2 | |a Knovel (Firm) |0 nr2001027264 | |
| 776 | 1 | |c Original |z 0815513690 |w (DLC) 94031248 |w (OCoLC)31044757 | |
| 951 | |a 728487 | ||
| 999 | f | f | |i 9513babe-efcc-567b-aa76-c6e9ea0512df |s e3cb09ef-48a2-57e0-8485-e6e08971268c |t 0 |
| 952 | f | f | |a Wentworth Institute of Technology |b Main Campus |c Wentworth Library |d Ebooks |t 0 |e Knovel |h Other scheme |
| 856 | 4 | 0 | |t 0 |u https://ezproxywit.flo.org/login?qurl=https://app.knovel.com/hotlink/toc/id:kpSIHHMVE1/semiconductor-industrial-hygiene |y Full text (Wentworth users only) |