Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics /

This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...

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Bibliographic Details
Main Author: Williams, Michael E.
Corporate Author: Knovel (Firm)
Other Authors: Baldwin, David G., Manz, Paul C.
Format: Electronic eBook
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1995]
Subjects:
Online Access: Full text (Wentworth users only)