Semiconductor industrial hygiene handbook monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
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Format: | Electronic eBook |
Language: | English |
Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1995]
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Online Access: |
Full text (Wentworth users only) |