Cleanrooms and associated controlled environments. Part 3, Test methods /
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectiona...
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Format: | eBook |
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Language: | English |
Published: |
Geneva :
ISO,
[2019]
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Edition: | First edition. |
Series: | International standard ;
ISO ISO 14644-3:2019. |
Subjects: |
Stacks
Call Number: |
697.9324 .I763 2019 |
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697.9324 .I763 2019 | Available |