Cleanrooms and associated controlled environments. Part 3, Test methods /

This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectiona...

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Bibliographic Details
Format: eBook
Language:English
Published: Geneva : ISO, [2019]
Edition:First edition.
Series:International standard ; ISO ISO 14644-3:2019.
Subjects:

Stacks

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Call Number: 697.9324 .I763 2019
697.9324 .I763 2019 Available