Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.

Handbook of cleaning for semiconductor manufacturing : fundamentals and applications /

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This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physic...

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Bibliographic Details
Main Author: Reinhardt, Karen A.
Other Authors: Reidy, Richard F., 1960-
Format: Electronic eBook
Language:English
Published: Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., ©2011.
Series:Wiley-Scrivener.
Subjects:
Semiconductors > Surfaces > Cleaning.
Surface preparation.
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