Control and Optimization of Multiscale Process Systems
Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...
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Main Author: | |
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Corporate Author: | |
Other Authors: | , , |
Format: | Electronic eBook |
Language: | English |
Published: |
Boston :
Birkhäuser Boston,
2009.
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Series: | Control engineering (Birkhäuser)
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Subjects: | |
Online Access: |
Full text (Wentworth users only). |
Table of Contents:
- List of Figures
- List of Tables
- Preface
- Introduction
- Multiscale Process Modeling and Simulation
- Control Using Kinetic Monte Carlo Models
- Construction of Stochastic PDEs
- Feedback Control Using Stochastic PDEs
- Optimization of Multiscale Process Systems
- Dynamic Optimization of Multiscale PDE/kMC Process Systems
- References
- Index.