Control and Optimization of Multiscale Process Systems

Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...

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Bibliographic Details
Main Author: Christofides, Panagiotis D.
Corporate Author: SpringerLink (Online service)
Other Authors: Armaou, Antonios, Lou, Yiming, Varshney, Amit
Format: Electronic eBook
Language:English
Published: Boston : Birkhäuser Boston, 2009.
Series:Control engineering (Birkhäuser)
Subjects:
Online Access: Full text (Wentworth users only).