Next generation micro/nano systems : selected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012-4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 /
The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on ""Next Generation Micro/Nano Systems"". The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/N...
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Other Authors: | , |
Format: | Electronic Conference Proceeding eBook |
Language: | English |
Published: |
Durnten-Zurich :
Trans Tech Publications Ltd,
[2013]
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Series: | Advances in science and technology ;
v. 81. |
Subjects: | |
Online Access: |
Full text (Wentworth users only) |
Local Note: | ProQuest Ebook Central |