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1
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2
Handbook of silicon based MEMS materials and technologies / Veikko Lindroos [and others].
Published 2010Full text (Wentworth users only)
Electronic eBook -
3
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4
Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and others].
Published 2015Full text (Wentworth users only)
Electronic eBook -
5
Handbook of silicon based MEMS materials and technologies / Veikko Lindroos [and others].
Published 2010Full text (Wentworth users only)
Electronic eBook -
6
Handbook of silicon based mems materials and technologies / edited by Markku Tilli [and five others].
Published 2020Full text (WIT users only)
Electronic eBook