Characterization in silicon processing

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Strausser, Yale
Format: Electronic eBook
Language:English
Published: Boston : Greenwich : Butterworth-Heinemann ; Manning, [1993]
Series:Materials characterization series.
Subjects:
Online Access: Full text (Wentworth users only)

MARC

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245 0 0 |a Characterization in silicon processing  |h [electronic resource] /  |c editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick. 
264 1 |a Boston :  |b Butterworth-Heinemann ;  |a Greenwich :  |b Manning,  |c [1993] 
264 4 |c ©1993 
300 |a xiii, 240 pages :  |b illustrations ;  |c 25 cm. 
336 |a text  |b txt  |2 rdacontent 
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490 1 |a Materials characterization series 
504 |a Includes bibliographical references and index. 
533 |a Electronic reproduction.  |b Norwich, N.Y. :  |c Knovel,  |d 2003.  |n System requirements: Adobe Acrobat Reader.  |n Available via the World Wide Web.  |n Access restricted to users at licensed institutions.  |n Includes interactive index. 
650 0 |a Silicon.  |0 sh 85122512  
650 0 |a Electric conductors.  |0 sh 85041622  
650 0 |a Semiconductor films.  |0 sh 85119892  
650 0 |a Surface chemistry.  |0 sh 85130718  
700 1 |a Strausser, Yale.  |0 n 93044462  
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