Characterization in silicon processing editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick.

Characterization in silicon processing

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Strausser, Yale
Format: Electronic eBook
Language:English
Published: Boston : Greenwich : Butterworth-Heinemann ; Manning, [1993]
Series:Materials characterization series.
Subjects:
Silicon.
Electric conductors.
Semiconductor films.
Surface chemistry.
Online Access: Full text (Wentworth users only)
Description
Physical Description:xiii, 240 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1591245257 (electronic bk.)
Reproduction Note:Electronic reproduction.

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