Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications / edited by Krishna Seshan.

Handbook of thin-film deposition processes and techniques principles, methods, equipment and applications /

The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers...

Full description

Saved in:
Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Seshan, Krishna
Format: Electronic eBook
Language:English
Published: Norwich, N.Y. : Noyes Publications/William Andrew Pub., [2002]
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Chemical vapor deposition > Handbooks, manuals, etc.
Online Access: Full text (Wentworth users only)

Internet

Full text (Wentworth users only)

Similar Items