Wentworth
Institute of Technology
Characterization in Silicon Processing
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Newnes,
2013.
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| Edition: | 1st edition. |
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| Online Access: |
Full text (Wentworth users only) |