Handbook of thin film deposition techniques principles, methods, equipment and applications / by Krishna Seshan.

Handbook of thin film deposition techniques principles, methods, equipment and applications /

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled...

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Bibliographic Details
Main Author: Seshan, Krishna (Author)
Corporate Author: Taylor and Francis
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, an imprint of Taylor and Francis, 2002.
Edition:First edition.
Subjects:
Chemical vapor deposition > Handbooks, manuals, etc.
Chemical vapor deposition.
Thin film devices > Design and construction > Handbooks, manuals, etc.
Thin film devices > Design and construction.
Thin films > Handbooks, manuals, etc.
Thin films.
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