Handbook of thin film process technology / editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA.

Handbook of thin film process technology /

"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and...

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Bibliographic Details
Other Authors: Glocker, D. A. (Editor), Shah, S. I. (Editor)
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, 2018.
Edition:First edition.
Subjects:
Surfaces (Technology) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Online Access: Full text (WIT users only)
Table of Contents:
  • chapter A Physical Deposition Techniques / Glocker David A
  • chapter A5.0 Reactive Sputtering: Introduction and General Discussion / William D Westwood
  • chapter A5.1 Reactive Pulsed DC Magnetron Sputtering and Control / Jochen M Schneider
  • chapter A5.2 AC and RF Reactive Sputtering / Grant O Este
  • chapter A5.3 Modeling of the Reactive Sputtering Process / S Berg.

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