Handbook of thin film process technology / editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA.

Handbook of thin film process technology /

"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and...

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Bibliographic Details
Other Authors: Glocker, D. A. (Editor), Shah, S. I. (Editor)
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, 2018.
Edition:First edition.
Subjects:
Surfaces (Technology) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Online Access: Full text (WIT users only)

MARC

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245 0 0 |a Handbook of thin film process technology /  |c editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA. 
250 |a First edition. 
264 1 |a Boca Raton, FL :  |b CRC Press,  |c 2018. 
300 |a 1 online resource (1 volume pages) 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
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505 0 |t chapter A Physical Deposition Techniques /  |r Glocker David A --   |t chapter A5.0 Reactive Sputtering: Introduction and General Discussion /  |r William D Westwood --   |t chapter A5.1 Reactive Pulsed DC Magnetron Sputtering and Control /  |r Jochen M Schneider --   |t chapter A5.2 AC and RF Reactive Sputtering /  |r Grant O Este --   |t chapter A5.3 Modeling of the Reactive Sputtering Process /  |r S Berg. 
520 |a "The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques."--Provided by publisher. 
650 0 |a Surfaces (Technology)  |v Handbooks, manuals, etc.  |0 sh 85130750  
650 0 |a Thin films  |v Handbooks, manuals, etc.  |0 sh 85134864  
700 1 |a Glocker, D. A.,  |e editor. 
700 1 |a Shah, S. I.,  |e editor. 
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