Handbook of thin film process technology / editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA.

Handbook of thin film process technology /

"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and...

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Bibliographic Details
Other Authors: Glocker, D. A. (Editor), Shah, S. I. (Editor)
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, 2018.
Edition:First edition.
Subjects:
Surfaces (Technology) > Handbooks, manuals, etc.
Thin films > Handbooks, manuals, etc.
Online Access: Full text (WIT users only)
Description
Summary:"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques."--Provided by publisher.
Physical Description:1 online resource (1 volume pages)
ISBN:9781351072793
9781351098137

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