Handbook of thin film process technology /
"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and...
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Other Authors: | , |
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Format: | Electronic eBook |
Language: | English |
Published: |
Boca Raton, FL :
CRC Press,
2018.
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Edition: | First edition. |
Subjects: | |
Online Access: |
Full text (WIT users only) |