Handbook of thin film process technology /

"The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and...

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Bibliographic Details
Other Authors: Glocker, D. A. (Editor), Shah, S. I. (Editor)
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, 2018.
Edition:First edition.
Subjects:
Online Access: Full text (WIT users only)