Silicon-molecular beam epitaxy. by E. Kasper.

Silicon-molecular beam epitaxy. Volume I /

This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si sta...

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Bibliographic Details
Main Author: Kasper, E. (Author)
Corporate Author: Taylor and Francis
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press, an imprint of Taylor and Francis, [2018]
Subjects:
Molecular beam epitaxy.
Silicon.
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