Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and others].

Handbook of silicon based MEMS materials and technologies /

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...

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Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Tilli, Markku (Editor)
Format: Electronic eBook
Language:English
Published: London, UK : William Andrew is an imprint of Elsevier, 2015.
Edition:Second edition.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Electronic books.
Online Access: Full text (Wentworth users only)

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