Handbook of thin film deposition techniques, processes, and technologies /

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Bibliographic Details
Corporate Author:	Knovel (Firm)
Other Authors:	Seshan, Krishna
Format:	Electronic eBook
Language:	English
Published:	Waltham [Mass.] : William Andrew, 2012.
Edition:	3rd ed.
Subjects:	Thin film devices > Design and construction > Handbooks, manuals, etc. Thin films. Thin film devices > Design and construction. Electronic books.
Online Access:	Full text (Wentworth users only)

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