Handbook of silicon based MEMS : materials & technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
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Format: | Electronic eBook |
Language: | English |
Published: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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Series: | Micro & nano technologies.
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Subjects: | |
Online Access: |
Full text (Wentworth users only) Full text (Wentworth users only) |