Handbook of silicon based MEMS : materials & technologies / by Veikko Lindroos [and others].

Handbook of silicon based MEMS : materials & technologies /

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...

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Bibliographic Details
Other Authors: Lindroos, Veikko
Format: Electronic eBook
Language:English
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Online Access: Full text (Wentworth users only)
Full text (Wentworth users only)
Table of Contents:
  • Silicon as MEMS Material
  • Modeling in MEMS
  • Measuring MEMS
  • Micromachining Technologies in MEMS
  • Encapsulation of MEMS Components.

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