Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz.

Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications /

This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.

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Bibliographic Details
Main Author: Vaz, Filipe
Other Authors: Martin, Nicolas, Fenker, Martin
Format: Electronic eBook
Language:English
Published: Sharjah : Bentham Science Publishers, 2013.
Subjects:
Thin films.
Online Access: Full text (Wentworth users only)
Local Note:ProQuest Ebook Central

Internet

Full text (Wentworth users only)

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