Database Needs for Modeling and Simulation of Plasma Processing.

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Bibliographic Details
Main Author:	Staff, National Research Council
Format:	Electronic eBook
Language:	English
Published:	Washington : National Academies Press, 1996.
Series:	The compass series Database needs for modeling and simulation of plasma processing
Subjects:	Semiconductors > Design and construction > Congresses. Plasma engineering > Databases > Congresses. Plasma engineering > Computer simulation > Congresses.
Online Access:	Full text (Wentworth users only)
Local Note:	ProQuest Ebook Central

Description
Physical Description:	1 online resource (74 pages)
Bibliography:	""REFERENCES""""4 Heterogeneous Processes ""; ""INTRODUCTION""; ""STATE OF THE DATABASE""; ""TECHNIQUES FOR IMPROVING THE DATABASE""; ""Approach""; ""Measurements On Realistic Plasma Reactors""; ""Incident Flux and Desorbing Flux Analysis""; ""Condition of the Surface""; ""Technology""; ""Ultrahigh-Vacuum Approach Using Mass and Energy Selected Reactive Beams""; ""Particle Beams""; ""Sticking Coefficients""; ""Synergistic Effects""; ""Substrate Temperature Dependence""; ""Angle Dependence""; ""Computer Simulations""; ""FINDINGS""; ""REFERENCES""; ""5 Electron Collision Processes ""
ISBN:	9780309573535 030957353X 0309055911 9780309055918
Language:	English.
Source of Description, Etc. Note:	Print version record.

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