Diffusion in silicon : a seven-year retrospective /
This collection of abstracts of experimental and theoretical papers on the subject of diffusion in silicon is intended to complement earlier volumes (DDF153-155) which covered the previous decade's work on the same topic. The abstracts are grouped according to the diffusing species in question....
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Other Authors: | |
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Format: | Electronic eBook |
Language: | English |
Published: |
Durnten-Zurich :
Trans Tech Publications, Inc.,
[2005]
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Series: | Diffusion and defect data. Defect and diffusion forum ;
v. 241. |
Subjects: | |
Online Access: |
Full text (Wentworth users only) |
Local Note: | ProQuest Ebook Central |
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245 | 0 | 0 | |a Diffusion in silicon : |b a seven-year retrospective / |c editor: D.J. Fisher. |
264 | 1 | |a Durnten-Zurich : |b Trans Tech Publications, Inc., |c [2005] | |
264 | 4 | |c ©2005 | |
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490 | 1 | |a Defect and Diffusion Forum ; |v Vol. 241 | |
504 | |a Includes bibliographical references and indexes. | ||
505 | 0 | |a Diffusion in Silicon -- A Seven-Year Retrospective; Table of Contents; Abstracts | |
506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
520 | |a This collection of abstracts of experimental and theoretical papers on the subject of diffusion in silicon is intended to complement earlier volumes (DDF153-155) which covered the previous decade's work on the same topic. The abstracts are grouped according to the diffusing species in question. The latter comprise Ag, Al, As, Au, B, Ba, Be, C, Ca, Cl, Co, Cr, Cu, Er, F, Fe, Ge, H, He, Hf, In, Ir, K, Mg, Mn, Mo, N, Na, Nb, Ni, O, P, Pb, Pt, Rb, Sb, Se, Si, SiH3, Sn, Ti, V, Yb and Zn with regard to bulk diffusion, Ag, Au, Ba, Cl, Cu, Er, F, Ga, Ge, In, O, Pb, Sb, Si, SiH3, Sn and Y with regard to surface diffusion, H with regard to grain-boundary diffusion, and self-diffusion in liquid Si. In a separate section, diffusion in SiGe alloys is covered. The work on bulk diffusion here involves the diffusants: As, Au, B, Cu, Ge, H, Li, P, Sb or Si. Overall, this succinct up-to-date guide to the topic of diffusion in silicon will be useful to anyone involved in the theory, development or processing of silicon-based semiconductors. | ||
533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
546 | |a English. | ||
583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
588 | 0 | |a Online resource; title from PDF title page (ebrary, viewed November 01, 2013). | |
590 | |a ProQuest Ebook Central |b Ebook Central Academic Complete | ||
650 | 0 | |a Silicon. | |
650 | 0 | |a Silicon |x Analysis. | |
650 | 0 | |a Diffusion. | |
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650 | 7 | |a diffusion. |2 aat | |
700 | 1 | |a Fisher, D. J. | |
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