Silicon Science and Advanced Micro-Device Engineering II : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering, December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology;...
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Format: | Electronic eBook |
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Language: | English |
Published: |
Switzerland :
Trans Tech Publications Ltd,
2011.
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Series: | Key engineering materials ;
v. 497. |
Subjects: | |
Online Access: |
Full text (Wentworth users only) |
Local Note: | ProQuest Ebook Central |