Wentworth
Institute of Technology
Silicon Carbide Microelectromechanical Systems For Harsh Environments.
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality u...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
World Scientific
2006.
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| Online Access: |
Full text (Wentworth users only) |
| Local Note: | ProQuest Ebook Central |