Diffusivity in silicon, 1953 to 2009 /

This work is essentially an update of previous compilations of information on the diffusivity of elements in semiconductor-grade silicon. It subsumes the data contained in B.L. Sharma's monograph on 'Diffusion in Semiconductors' (Trans Tech Publications, 1970), plus the data contained...

Full description

Saved in:
Bibliographic Details
Other Authors: Fisher, D. J.
Format: Electronic eBook
Language:English
Published: Stafa-Zuerich : Trans Tech, ©2010.
Series:Diffusion and defect data. Defect and diffusion forum ; v. 302.
Subjects:
Online Access: Full text (Wentworth users only)
Local Note:ProQuest Ebook Central