Diffusivity in silicon, 1953 to 2009 /
This work is essentially an update of previous compilations of information on the diffusivity of elements in semiconductor-grade silicon. It subsumes the data contained in B.L. Sharma's monograph on 'Diffusion in Semiconductors' (Trans Tech Publications, 1970), plus the data contained...
Saved in:
Other Authors: | |
---|---|
Format: | Electronic eBook |
Language: | English |
Published: |
Stafa-Zuerich :
Trans Tech,
©2010.
|
Series: | Diffusion and defect data. Defect and diffusion forum ;
v. 302. |
Subjects: | |
Online Access: |
Full text (Wentworth users only) |
Local Note: | ProQuest Ebook Central |