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    Handbook of thin film process technology / editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA.

    Handbook of thin film process technology / editors, David A. Glocker, Isoflux Inc., NY, USA, S. Ismat Shah, E.I. du Pont de Nemours & Co., Wilmington, DE, USA.

    Published 2018
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